| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photoelectric conversion device capable of planarizing an upper surface of a color filter to provide a predetermined film thickness with high accuracy. <P>SOLUTION: A lower electrode 14, an intermediate layer 15 made of an organic photoelectric conversion material, an upper electrode 16, a transparent insulating layer 17, and first to third coloring layers 75, 79, and 83 are laminated in due order on an upper surface 13a of a semiconductor substrate 13. A polishing stopper layer 18 is formed outside an effective pixel area where the lower electrode 14, the interlayer 15, the upper electrode 16, and the first to third coloring layers 75, 79, and 83 are overlapped. When planarizing the first to third coloring layers 75, 79, and 83 by a polishing process, planarization is performed until the polishing stopper layer 18 is exposed and therefore an end point can be easily detected. <P>COPYRIGHT: (C)2010,JPO&INPIT |
