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发明名称
TRANSIENT CAPACITY MEASURING APPARATUS
摘要
申请公布号
JPH02306154(A)
申请公布日期
1990.12.19
申请号
JP19890127600
申请日期
1989.05.20
申请人
HORIBA LTD
发明人
KINOSHITA DAIJIROU
分类号
G01N27/00;G01N27/22;H01L21/66
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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