| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration detecting apparatus capable of self-diagnosis at a small voltage. <P>SOLUTION: The acceleration detecting apparatus 1 is provided with an acceleration detection element 3 and a fixed electrode 20. The acceleration detection element 3 comprises both a substrate 5 having a flexible part and a weight part 7 connected to the substrate 5 and having an electric conduction part made of metal and detects acceleration according to the bending of the flexible part. The fixed electrode 20 is provided with a prescribed gap from the weight part 7. Self-diagnosis is performed by making an electrostatic attractive force act between the weight part 7 and the fixed electrode 20 by applying a voltage to the weight part 7 via a through conductor 6. <P>COPYRIGHT: (C)2010,JPO&INPIT |
