发明名称 Screen printing method
摘要 The invention provides a method for improving accuracy during a plurality of screen printing steps. After a first layer and an alignment mark are printed on a workpiece, the alignment mark is imaged by a camera so that the alignment mark is stored as image data in an image processing device adapted to deliver reference data for subsequent printing, and the image data is used to renew the reference data in the image processing device.
申请公布号 EP2216175(A1) 申请公布日期 2010.08.11
申请号 EP20100250225 申请日期 2010.02.10
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 MITTA, RYO;OTSUKA, HIROYUKI;SAKAI, IKUO;ABE, KENJI;ISHIKAWA, NAOKI
分类号 B41F15/08;B41F15/26;B41F33/00;B41M1/12;H01L31/0224;H01L31/18;H05K3/12 主分类号 B41F15/08
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