<p>PURPOSE: A transport jig is provided to prevent the warpage of a substrate by increasing the supporting area of the substrate. CONSTITUTION: A transport jig is divided in a plurality of unit regions in order to support a plurality of unit substrates. A plurality of absorption holes(110) are formed on a base corresponding to the unit region. A plurality of supporting parts(120) surrounds the adsorption hole by being combined with one side of the base in order to support the unit substrate. A plurality of protrusions(125) are projected to one side of the supporting part in order to support the unit substrate. A plurality of adsorption holes are arranged to face with each other in the unit area.</p>
申请公布号
KR20100087890(A)
申请公布日期
2010.08.06
申请号
KR20090006936
申请日期
2009.01.29
申请人
SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人
JEONG, SUNG WON;AN, JIN YONG;KIM, JIN HO;LEE, SEOK KYU;LEE, JAE JOON