发明名称 TRAY TRANSFERRING APPARATUS
摘要 PURPOSE: A tray transferring apparatus is provided to be cost-effectively manufactured by simplifying the whole structure of the apparatus through the reduction of the number of grippers. CONSTITUTION: A plurality of holders(220) is connected with linear-motion(LM) guide(162) which is mobile along a LM rail(152). A dual gripper(210) is arranged. A driving unit(300) is composed of an LM rail(252), an LM guide(260), and moving cylinders(270, 272). The LM rail is installed to an auxiliary base-plate(120). The LM guide is inserted into the LM rail to be mobile. The moving cylinders are installed to one side of the LM rail. A cylinder-location detecting sensor(400) detects the location of the moving cylinders. A tray detecting sensor(500) detects the location of the tray.
申请公布号 KR20100087575(A) 申请公布日期 2010.08.05
申请号 KR20090006671 申请日期 2009.01.28
申请人 EVERTECHNO CO., LTD. 发明人 YEOM, JUNG TACK;BAEK, JONG KUK
分类号 G01R31/26;H01L21/66;H01L21/67 主分类号 G01R31/26
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