发明名称 |
TRAY TRANSFERRING APPARATUS |
摘要 |
PURPOSE: A tray transferring apparatus is provided to be cost-effectively manufactured by simplifying the whole structure of the apparatus through the reduction of the number of grippers. CONSTITUTION: A plurality of holders(220) is connected with linear-motion(LM) guide(162) which is mobile along a LM rail(152). A dual gripper(210) is arranged. A driving unit(300) is composed of an LM rail(252), an LM guide(260), and moving cylinders(270, 272). The LM rail is installed to an auxiliary base-plate(120). The LM guide is inserted into the LM rail to be mobile. The moving cylinders are installed to one side of the LM rail. A cylinder-location detecting sensor(400) detects the location of the moving cylinders. A tray detecting sensor(500) detects the location of the tray. |
申请公布号 |
KR20100087575(A) |
申请公布日期 |
2010.08.05 |
申请号 |
KR20090006671 |
申请日期 |
2009.01.28 |
申请人 |
EVERTECHNO CO., LTD. |
发明人 |
YEOM, JUNG TACK;BAEK, JONG KUK |
分类号 |
G01R31/26;H01L21/66;H01L21/67 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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