发明名称 STRUCTURE COMPRISING A GETTER LAYER AND AN ADJUSTING SUBLAYER AND FABRICATION PROCESS
摘要 The structure comprises at least a device, for example a microelectronic chip, and at least a getter arranged in a cavity under a controlled atmosphere delineated by a substrate and a sealing cover. The getter comprises at least one preferably metallic getter layer, and an adjustment sub-layer made from pure metal, situated between the getter layer and the substrate, on which it is formed. The adjustment sub-layer is designed to modulate the activation temperature of the getter layer. The getter layer comprises two elementary getter layers.
申请公布号 US2010193215(A1) 申请公布日期 2010.08.05
申请号 US20080679487 申请日期 2008.10.09
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 BAILLIN XAVIER
分类号 H05K5/06 主分类号 H05K5/06
代理机构 代理人
主权项
地址