| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring apparatus highly precisely measuring a three-dimensional shape of a measured object in a short time. SOLUTION: The shape measuring apparatus 1 comprises a transmission image detection part 4 which irradiates the measured object S with illumination light to detect the light transmitting through the measured object S and outputs the transmission image of the measured object S; a surface shape measuring part 5 which measures the shape of the surface including at least the area where the illumination light transmits through among the surface of the measured object S; and a control part 7 which corrects the shape data taken from the transmitting image of the measured object S output from the transmission image detection part 4 by a value measured at the surface shape measuring part 5. COPYRIGHT: (C)2010,JPO&INPIT
|
