| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source device in which radiant light is reliably reflected on an ellipsoidal reflecting surface without attenuated and is efficiently utilized, by introducing a laser beam by using a region which is not irradiated with reflected light due to the reflected light from the ellipsoidal reflecting mirror being blocked. <P>SOLUTION: The light source device includes: an ellipsoidal reflecting mirror 2; a plasma generation vessel 1, which is arranged at a focal point of the ellipsoidal reflecting mirror 2 and encloses an emission material inside, where a laser beam is condensed from an opening side of the ellipsoidal reflecting mirror 2 to irradiate and excite the emission material to emit radiant light; and a planar mirror 4, which receives the radiant light reflected by the ellipsoidal reflecting mirror 2 and changes the direction of the reflected light. The planar mirror 4 has a window 41 to introduce the laser beam, the window present in an unirradiated region F1-F2 where the reflected light from the ellipsoidal reflecting mirror 2 is blocked by the plasma generation vessel 1. <P>COPYRIGHT: (C)2010,JPO&INPIT |
