| 摘要 |
PROBLEM TO BE SOLVED: To measure not only the height of the outermost layer, but also the height of the upper surface (or the lower surface) of the other layers of an inspection object, constituted by forming a transparent or translucent material layer on a material layer, in a single scanning/imaging process. SOLUTION: A height measuring device is constituted to calculate the height of an inspection portion from the height position of focus plane FS, obtained corresponding to initially detected light quantity peak after starting reading of scanned image from a memory device 32. The height measuring device calculates the height of the focus plane corresponding to a light amount peak detected on and after a predetermined spot out of light amount peaks successively detected after starting reading the scanned images. COPYRIGHT: (C)2010,JPO&INPIT
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