| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve energy-saving in a device and a method for vacuum processing. Ž<P>SOLUTION: The vacuum device 100 includes a processing vessel 101 where a processed body is accommodated, a conveyance vessel 107 by which the processed body is conveyed from the processing vessel 101, a turbo pump 103 and a dry pump 106 (a first dry pump) that evacuate the processing vessel 101, a dry pump 110 (a second dry pump) that evacuates the conveyance vessel 107, an exhaust line (a first exhaust line) 131 that connects the processing vessel 101, turbo pump 103, and dry pump 106 in this order, an exhaust line 132 (a second exhaust line) that connects the conveyance vessel 107 and dry pump 110 to each other, an exhaust line 133 (a third line) that connects a portion between the turbo pump 103 and dry pump 106 and exhaust line 132, and a valve 119 provided in the exhaust line 133. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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