发明名称 METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
摘要 A method of manufacturing a semiconductor device is disclosed, wherein a plating layer is formed on a first surface side of a semiconductor substrate stably and at a low cost, while preventing the plating liquid from being contaminated and avoiding deposition of uneven plating layer on a second surface side. An electrode is formed on the first surface of the semiconductor substrate, and another electrode is formed on the second surface. A curing resin is applied on the electrode on the second surface and a film is stuck on the curing resin, and the curing resin is then cured. After that, a plating process is conducted on the first surface. The film and the curing resin are then peeled off.
申请公布号 US2010197127(A1) 申请公布日期 2010.08.05
申请号 US20100700044 申请日期 2010.02.04
申请人 FUJI ELECTRIC SYSTEMS CO., LTD. 发明人 URANO YUICHI
分类号 H01L21/283 主分类号 H01L21/283
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