发明名称 |
SYSTEM AND METHOD FOR HIGH SPEED LASER MATERIAL PROCESSING |
摘要 |
<p>A system and associated method for laser processing of material specimens comprising a laser mounted to scan onto a track wherein the specimens are forwarded along the track in a forwarding direction, the laser is scanned over said track in a second direction, and the substrates are angled to the track.</p> |
申请公布号 |
WO2010086865(A1) |
申请公布日期 |
2010.08.05 |
申请号 |
WO2010IL00090 |
申请日期 |
2010.02.02 |
申请人 |
ADVANCED DICING TECHNOLOGIES LTD.;ARAN, HAGAI;KITAY, RON |
发明人 |
ARAN, HAGAI;KITAY, RON |
分类号 |
B23K26/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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