| 摘要 |
PROBLEM TO BE SOLVED: To provide a test gas spraying system capable of performing precise leak test, by shortening the time elapsed, from the bombing completion time to the leak test start time point and having a simple structure. SOLUTION: A carrier 10 has a rod-shape, and is structured so that a work is loaded into a housing recessed part 12 along the axial direction. A carrier support 20 includes a plurality of chambers 21 which are mutually independent. The chambers 21 are parallel to each other, extend linearly, and are arranged coplanarly. The carrier support 20 is moved in the arrangement direction of the chambers 21 by a moving means. At least one chamber 21 is selectively positioned at a specific position. The carrier 10 of the chamber 21 at the specific position is carried in and out by a conveyance means. When the carrier 10 is at a housing position, a part between the inner periphery of an opening edge part of the chamber 21 and the outer periphery of the edge part of the carrier 10 corresponding thereto are sealed by an O-ring 14, and the chamber 21 is sealed. In this sealed state, the test gas is supplied to the chamber 21. COPYRIGHT: (C)2010,JPO&INPIT
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