发明名称 BOLT AND PLASMA PROCESSING APPARATUS PROVIDED WITH SAME
摘要 A bolt which is driven into a female screw portion disposed in a brittle member in a wear environment includes a head formed of a wear resistant material, a body which is formed of a resin having elasticity or plasticity and has a first male screw portion, and a placed member disposed between the head and the body and formed of a wear resistant resin having elasticity or plasticity. The body further includes a second male screw portion disposed along a central axis of the body and the head includes a female screw portion which the second male screw portion is driven into. The placed member is of a plate shape and has a through hole in its central portion, and a diameter of the through hole is smaller than or equal to a nominal diameter of the first male screw portion and larger than or equal to a nominal diameter of the second male screw portion.
申请公布号 US2010192354(A1) 申请公布日期 2010.08.05
申请号 US20100722307 申请日期 2010.03.11
申请人 TOKYO ELECTRON LIMITED 发明人 HORIMIZU MAKOTO
分类号 B23P11/00 主分类号 B23P11/00
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