METHOD FOR SYNTHESIZING AMORPHOUS SILICON NITRIDE

摘要

A method for synthesizing amorphous silicon nitride, wherein silicon halide and ammonia are reacted in a reaction vessel at a high temperature in the absence of oxygen to thereby synthesize amorphous silicon nitride powder, the powder is separated from a gas containing therein gaseous ammonium halide which has been produced simultaneously with said amorphous silicon nitride by a collecting means, comprises directly mixing, in advance of the separation, cool gas containing therein neither oxygen nor moisture into said gas to cool down said powder and gas so that both substances may be put in said collecting means without deposition of ammonium halide on the inner wall of the reaction vessel, and other component parts.