发明名称 LENS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a reliable lens which suppresses a deterioration in optical performance. <P>SOLUTION: The lens 10 is used in a state where a direction of an optical axis 1b passing through a curvature center of a lens surface is different from a direction of a gravitational force, and a position of a center 1a of a light beam effective portion 3 (a position of the optical axis on the lens surface) is displaced (is eccentric) from a position of an outside diameter center 2a of the lens 10 (a center position of a lens outside diameter). Specifically, the center 1a of the light beam effective portion 3 is positioned at an upper side by a distance &beta; from the outside diameter center 2a of the lens 10. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010169718(A) 申请公布日期 2010.08.05
申请号 JP20090009581 申请日期 2009.01.20
申请人 CANON INC 发明人 KAWAHARA NOBUMICHI
分类号 G02B3/00;G02B7/02;G02B13/24;G03F7/20;H01L21/027 主分类号 G02B3/00
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