发明名称 |
Method of Manufacturing a Micro-Electrical-Mechanical System with Thermally Isolated Active Elements |
摘要 |
A method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements. Such a system may embody a bolometer, which is well suited for detecting electromagnetic radiation between 90 GHz and 30 THz while operating at room temperature. The method also discloses a generalized process for manufacturing circuitry incorporating active and passive micro-electrical-mechanical systems in a silicon wafer. |
申请公布号 |
US2010197063(A1) |
申请公布日期 |
2010.08.05 |
申请号 |
US20090365284 |
申请日期 |
2009.02.04 |
申请人 |
NORTHROP GRUMMAN SYSTEMS CORPORATION |
发明人 |
BLUZER NATHAN;KRISHNASWAMY SILAI V.;SMITH PHILIP C. |
分类号 |
H01L21/56;H01L29/84 |
主分类号 |
H01L21/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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