METHOD OF FORMING A DEPOSIT

摘要

A method of forming a deposit of a material comprising the steps of: providing a source member comprising a source material, a first portion of the source member being provided in juxtaposition with one or more structures; and heating the source member thereby to cause a flux of the source material from the source member to the one or more structures whereby a deposit of source material is formed on the one or more structures, wherein the source member comprises one or more elongate source element having a longitudinal axis, the one or more source elements having a dimension in each of two generally orthogonal directions normal to the longitudinal axis of the source element that is less than or substantially equal to 500nm.