| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing device which can correct the position in Z direction of a blade with simple operation even when the suction board of a work table is exchanged. SOLUTION: The dicing device is provided with a map correction means 46 which corrects the error in straightness at the time of the blade 12 shifting in Y direction, and further is provided with an inclination correction means 48 which corrects the inclination of the suction board 24A of the work table 24. |
