PARTICLE-MEASURING UNIT

摘要

The present invention relates to a particle-measuring unit comprising: a housing; and a condensation particle detection unit including an atomizer unit, a saturator, a condenser, and an optical condensation particle counter. The atomizer unit is disposed in the housing, in fluid communication with a high pressure DI water line and branched from the high pressure DI water line, and atomizes DI water containing particles. The saturator is arranged downstream from the atomizer unit in the housing, and saturates a saturated working fluid with the particles. The condenser condenses the particles with which the working fluid has been saturated by the saturator. The optical condensation particle counter counts the condensed saturated particles.