| 发明名称 |
MANUFACTURING OF ADDUCT FREE ALKALINE-EARTH METAL Cp COMPLEXES |
| 摘要 |
Methods and compositions for the deposition of a metal containing film on a substrate. The film is deposited with a substantially adduct free precursor which is prepared by a process to remove the adduct from an adducted starting material.
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| 申请公布号 |
US2010189898(A1) |
申请公布日期 |
2010.07.29 |
| 申请号 |
US20100691981 |
申请日期 |
2010.01.22 |
| 申请人 |
AIR LIQUIDE ELECTRONICS U.S. LP |
发明人 |
WAN ZHIWEN;MISRA ASHUTOSH |
| 分类号 |
C23C16/18;C07F17/00;C23C16/44 |
主分类号 |
C23C16/18 |
| 代理机构 |
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代理人 |
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| 地址 |
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