| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a rear-incident photodiode array capable of suppressing the occurrence of noise, while suppressing deterioration in the durability of semiconductor substrates due to the formation of modified regions. <P>SOLUTION: The photodiode array 1 includes: an n-type semiconductor substrate 3, including a front and rear surfaces 3a, 3b facing each other; a plurality of p-type semiconductor regions 5 that are disposed side by side at the rear surface 3b side of the semiconductor substrate 3, with each being constituted of a photodiode 13 by a p-n junction 11 with the semiconductor substrate 3; and an n-type semiconductor region 7, that is disposed between the adjacent p-type semiconductor regions 5 on the rear surface 3b side and allows the impurity concentration to be set higher than that of the semiconductor substrate 3. A modified region 50 is formed, without reaching the front surface 3a and the n-type semiconductor region 7 on the semiconductor substrate 3, by focusing the focusing point to a prescribed position between the front surface 3a and by having the n-type semiconductor region 7 irradiated with a laser beam. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
