| 摘要 |
PROBLEM TO BE SOLVED: To increase tilting precision by smoothly operating a tilting stand. SOLUTION: A tilting apparatus 1 is provided with the tilting stand 2 disposed on a flat base 3 at a predetermined interval; a piezoelectric element 5 disposed between the tilting stand 2 and the base 3, extending in a substantially parallel direction to a top face of the base 3 and extendable in a first direction forming the extending direction; and a displacement enlarging member disposed between the piezoelectric element 5 and the base 3, enlarging the displacement in the first direction by the expansion/contraction of the piezoelectric element 5, in a second direction substantially orthogonal to the base 3 by self deformation and having a transmission part 66 transmitting the displacement by the enlarging to the tilting stand 2. The displacement enlarging member latches one end of the piezoelectric element 5 in the extending direction, supports the tilting stand 2 from downward by the transmission part 66 so that the transmission part 66 is displaced in a second direction, according to the displacement of the piezoelectric element 5 and makes the tilting stand 2, relative tilt to the base 3. COPYRIGHT: (C)2010,JPO&INPIT
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