METHOD FOR MANUFACTURING SOLAR CELL, AND SOLAR CELL

摘要

Disclosed is a method for manufacturing a solar cell which comprises a transparent conductive film (54) that is formed on a transparent substrate (6, 51). In the method, a target (7), which is composed of a material containing a main constituent material ZnO and a substance containing Al or Ga, is prepared; a first layer (54a) constituting the transparent conductive film (54) is formed by applying a sputtering voltage to the target (7) in a first atmosphere containing a process gas; a second layer (54b) constituting the transparent conductive film (54) is formed on the first layer (54a) by applying a sputtering voltage to the target (7) in a second atmosphere that contains more oxygen gas than the first atmosphere; and a recessed and projected pattern is formed by etching the transparent conductive film (54).