| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring method which enables the measurement of the shape of an aspherical surface as a surface under measurement with high precision. Ž<P>SOLUTION: The measuring method is employed to irradiate a surface under measurement having an aspherical surface with a light beam having a spherical wave and to measure the shape of the surface under measurement. The method includes: a first detection step in which a plurality of positions zi (i=1 to N) are positioned in order by driving the surface under measurement, with the center of curvature of the spherical wave being on the aspherical surface axis of the aspherical surface, in the aspherical surface axial direction and an interference pattern between a light beam from the surface under measurement and a light beam from a reference surface is detected at each of the plurality of positions zi; and a second detection step in which the surface under measurement is positioned at each of a plurality of shift positions si (i=1 to N), each of which is shifted from each of the plurality of positions zi in a direction perpendicular to the aspherical surface axis by a known amount, and in which an interference pattern between the light beam from the surface under measurement and the light beam from the reference surface is detected at each of the plurality of shift positions si. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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