发明名称 Method for low temperature growth of inorganic materials from solution using catalyzed growth and re-growth
摘要 The present invention involves a method and apparatus for depositing a silicon oxide onto a substrate from solution at low temperatures in a manner that produces homogeneous growth of the silicon oxide. The method generally comprises the following steps: (a) Chemically treating a substrate to activate it for growth of the silicon oxide. (b) Immersing the treated substrate into a bath with a reactive solution. (c) Regenerating the reactive solution to allow for continued growth of the silicon oxide. In another embodiment of the present invention, the apparatus includes a first container holding a reactive solution, a substrate on which the silicon oxide is deposited, a second container holding silica, and a means for adding silica to the reactive solution.
申请公布号 US2010186665(A1) 申请公布日期 2010.07.29
申请号 US20100751434 申请日期 2010.03.31
申请人 WILLIAM MARSH RICE UNIVERSITY 发明人 BARRON ANDREW R.;WHITSITT ELIZABETH ANNE
分类号 B05C17/01;C23C8/02;C23C8/40;C23C18/00;H01L21/316 主分类号 B05C17/01
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