| 摘要 |
PROBLEM TO BE SOLVED: To provide a recipe generator for preventing a failure in a vacuum pump to be used under a low vacuum atmosphere. SOLUTION: A treatment apparatus includes a treatment container for storing a workpiece, a holding means for holding the workpiece, a gas introduction means, a gas feed means having a plurality of gas feed lines connected to the gas introduction means, and an evacuation system having a vacuum pump. A recipe generator having a plurality of treatment steps to perform treatment by using the treatment apparatus includes an input part for inputting a flow rate of the gas to flow via each gas feed line as a temporary gas flow rate, a gas flow rate cumulating part for cumulating the respective temporary gas flow rates by each treatment step to obtain the temporary total gas flow rate, a comparing and determining part for comparing the temporary total gas flow rate with the predetermined permission value of the vacuum pump and determining whether the temporary total gas flow rate is accepted or not, and a recipe storage part for storing a recipe, which includes the temporary total gas flow rate accepted by the result of the comparing and determining part, as a performable recipe. COPYRIGHT: (C)2010,JPO&INPIT |
