REFRACTIVE INDEX MEASURING APPARATUS

摘要

Two probe optical systems (22, 24) are arranged such that the optical systems sandwich a subject to be inspected (23) therebetween, and by using the probe optical systems for measurement, the optical path length of light passing through the locally specified portion of the subject is calculated using the interference signals. The geometrical thickness of the same portion is calculated by measuring the position of the probe optical systems. Thus, both calculated values are obtained, and based on such values and the calculated values of a reference material, the refractive index distribution of the subject to be inspected is obtained.