Charged particle beam device with ozone supply,申请号EP20060003722-传众专利搜索

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发明名称	Charged particle beam device with ozone supply
摘要
申请公布号	EP1826808(B1)	申请公布日期	2010.07.28
申请号	EP20060003722	申请日期	2006.02.23
申请人	ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH	发明人	FROSIEN, JUERGEN;ELGAR, YACOV
分类号	H01J37/02;H01J37/244;H01J37/26;H01J37/317	主分类号	H01J37/02
代理机构		代理人
主权项
地址

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