Micromachined planar gyrometer with an out-of-plane detection by strain gauge

摘要

The device has a thick zone comprising free mechanical masses (3, 3') adapted to be vibrated in its plane (S) perpendicular to a rotational axis (Z), and a vibrating unit vibrating each mass in the plane. A thin zone forms a suspended type strain gauge (4) e.g. resonator, for detecting a rotational movement of the mass around another rotational axis. The thin zone extends in a plane parallel to a plane of a substrate (50), and extends in a plane perpendicular to the latter rotational axis. The thin zone is connected to one of the thick zone and another thick zone and to the substrate.