SEMICONDUCTOR DEVICE SUITABLE FOR FORMING CONDUCTIVE FILM SUCH AS PLATINUM WITH GOOD COVERAGE, AND ITS MANUFACTURE,申请号KR20040001429-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE SUITABLE FOR FORMING CONDUCTIVE FILM SUCH AS PLATINUM WITH GOOD COVERAGE, AND ITS MANUFACTURE
摘要
申请公布号	KR100972212(B1)	申请公布日期	2010.07.26
申请号	KR20040001429	申请日期	2004.01.09
申请人		发明人
分类号	C23C16/30;H01L21/8242;H01L21/02;H01L21/31;H01L21/822;H01L21/8246;H01L27/04;H01L27/10;H01L27/105;H01L27/108	主分类号	C23C16/30
代理机构		代理人
主权项
地址

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