发明名称 TECHNIQUE FOR MANUFACTURING A SOLAR CELL
摘要 Techniques for manufacturing solar cells are disclosed. In one particular exemplary embodiment, the technique may comprise disposing a mask upstream of the solar cell, the mask comprising a plurality of fiiaments spaced apart from one another to define at least one aperture; directing a ribbon ion beam of desired species toward the solar cell to ion implant a portion of the solar cell defined by the at least one aperture of the mask; and orienting the ribbon ion beam such that longer cross-section dimension of the ribbon beam is perpendicular to the aperture in one plane.
申请公布号 WO2010065204(A3) 申请公布日期 2010.07.22
申请号 WO2009US61288 申请日期 2009.10.20
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES;BLAKE, JULIAN, G.;DANIELS, KEVIN, M. 发明人 BLAKE, JULIAN, G.;DANIELS, KEVIN, M.
分类号 H01L31/042;H01L21/265 主分类号 H01L31/042
代理机构 代理人
主权项
地址
您可能感兴趣的专利