Techniques for manufacturing solar cells are disclosed. In one particular exemplary embodiment, the technique may comprise disposing a mask upstream of the solar cell, the mask comprising a plurality of fiiaments spaced apart from one another to define at least one aperture; directing a ribbon ion beam of desired species toward the solar cell to ion implant a portion of the solar cell defined by the at least one aperture of the mask; and orienting the ribbon ion beam such that longer cross-section dimension of the ribbon beam is perpendicular to the aperture in one plane.
申请公布号
WO2010065204(A3)
申请公布日期
2010.07.22
申请号
WO2009US61288
申请日期
2009.10.20
申请人
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES;BLAKE, JULIAN, G.;DANIELS, KEVIN, M.