发明名称 |
DIFFUSER SUPPORT |
摘要 |
Embodiments of gas distribution apparatus comprise a diffuser support member coupled to a diffuser and movably disposed through a backing plate. Embodiments of methods of processing a substrate on a substrate receiving surface of a substrate support comprise providing a diffuser in which a diffuser support member supports the diffuser and is movably disposed through the backing plate.
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申请公布号 |
US2010181024(A1) |
申请公布日期 |
2010.07.22 |
申请号 |
US20100749172 |
申请日期 |
2010.03.29 |
申请人 |
WHITE JOHN M;TINER ROBIN L;CHANG YEH KURT |
发明人 |
WHITE JOHN M.;TINER ROBIN L.;CHANG YEH KURT |
分类号 |
C23F1/08;C23C16/00;C23C16/455 |
主分类号 |
C23F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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