| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve size reduction and achieve high precision of movement precision. Ž<P>SOLUTION: An actuator 70 comprises a linear motor having movable element 43 moving along a fixed shaft 3, a guide rail 42 sandwiching and guiding the movable element in the inside thereof and serving as the fixed side, and a support means 41 interposed between the guide rail and the movable element, and movably supporting the movable element. The support means is arranged so that mutual support centers are orthogonal to the thickness direction of the movable element, and apart in the same distance from the center of axe to the reverse direction along a horizontal plane including the center of axe of the fixed shaft. Moreover, the actuator 70 has static pressure pads 51, 57 supporting a guide surface of a guide rail, and a supply means for supplying fluid to the static pressure pads through flow passages 52, 57c. The fixed shaft has a coil to which a cable is connected. The static pressure pad is formed in the movable element. The movable element has a permanent magnet 4 inside, and can be moved without dragging the cable. The flow passage is prepared in the guide rail, and does not move with the movable element. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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