发明名称 COMPUTER GENERATED HOLOGRAM, EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
摘要 The present invention provides a computer generated hologram including a plurality of cells which form a light intensity distribution on a predetermined plane, the plurality of cells including a plurality of first cells including isotropic media and anisotropic media, and a plurality of second cells including anisotropic media alone, wherein the plurality of cells change a phase of incident light which impinges on each of the plurality of cells to form a phase distribution including N (N≧2) for each of a wavefront of a linearly polarized light component in a first direction and a wavefront of a linearly polarized light component in a second direction perpendicular to the first direction.
申请公布号 US2010183956(A1) 申请公布日期 2010.07.22
申请号 US20090481428 申请日期 2009.06.09
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUBARA ISAO
分类号 G02B5/32;G03B27/54;G03F7/20;G03H1/08 主分类号 G02B5/32
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