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发明名称
Method of smoothing the outline of a useful layer of material transferred onto a support substrate
摘要
申请公布号
EP2164097(A3)
申请公布日期
2010.07.21
申请号
EP20090178893
申请日期
2003.07.16
申请人
S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
GHYSELEN, BRUNO
分类号
H01L21/304;H01L21/762
主分类号
H01L21/304
代理机构
代理人
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地址
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