发明名称
摘要 An interface detection apparatus detects a position of a hidden interface between first and second materials, the first material having a different physical property from the second material. The apparatus encompasses (a) an irradiation mechanism configured to irradiate an electromagnetic wave onto a sample implemented by the first and second materials, (b) a detection mechanism configured to detect the electromagnetic wave that has passed through the sample, and (c) a traveling mechanism configured to change the relative position of the hidden interface with respect to the position of the detection mechanism.
申请公布号 JP4505629(B2) 申请公布日期 2010.07.21
申请号 JP20040011147 申请日期 2004.01.19
申请人 发明人
分类号 G01F23/284;G01N22/00;G01R27/04;G01R27/32 主分类号 G01F23/284
代理机构 代理人
主权项
地址