HIGH RESOLUTION PATTERNING METHOD BY USING SOLVENT-MEDIATED NANO TRANSFER DIRECT PRINTING

摘要

PURPOSE: A method for forming a micro pattern is provided to transfer a functional material pattern on a substrate by contacting a stamp with a pattern on the substrate with a liquid flow layer. CONSTITUTION: A stamp(10) with a pattern is prepared. A functional material(30) is selectively filled in the only intaglio part of the stamp. A substrate(40) to be transferred is prepared. A liquid flow layer(50) is formed by spraying solvents on the surface of the substrate. A functional material pattern is transferred on the substrate by contacting the stamp with the substrate. The stamp is separated from the substrate.