| 摘要 |
A relationship between surface decenter of a lens 1 under test and surface-decenter comatic aberration and a relationship between surface tilt of the lens 1 under test and surface-tilt comatic aberration are calculated by computer simulation. The surface tilt of the lens 1 under test is calculated by measuring a transmissive wavefront of a projecting portion 3, and comatic aberration of the lens 1 under test is calculated by measuring a transmissive wavefront of a lens portion 2. The surface-decenter comatic aberration that occurs due to the surface decenter is calculated by subtracting the surface-tilt comatic aberration from the calculated comatic aberration. The surface decenter of the lens 1 under test is calculated based on the calculated surface-decenter comatic aberration.
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