发明名称 |
Process for manufacturing a reference leak |
摘要 |
A method for making a reference leak includes the steps of: (a) preparing a substrate; (b) forming a patterned catalyst layer on the substrate, the patterned catalyst layer comprising one or more catalyst blocks; (c) forming one or more elongate nano-structures extending from the corresponding catalyst blocks by a chemical vapor deposition method; (d) forming a leak layer of one of a metallic material, a glass material, and a ceramic material on the substrate with the one or more elongate nano-structures partly or completely embedded therein; and (e) removing the one or more elongate nano-structures and the substrate to obtain a reference leak with one or more leak holes defined therein.
|
申请公布号 |
US7757371(B2) |
申请公布日期 |
2010.07.20 |
申请号 |
US20050228967 |
申请日期 |
2005.09.16 |
申请人 |
TSINGHUA UNIVERSITY;HON HAI PRECISION INDUSTRY CO., LTD. |
发明人 |
LIU LIANG;TANG JIE;LIU PENG;HU ZHAO-FU;DU BING-CHU;GUO CAI-LIN;CHEN PI-JIN;GE SHUAI-PING;FAN SHOU-SHAN |
分类号 |
B21B1/46;B21B13/22;B22D11/126;B22D11/128;B23P17/00;B23P25/00 |
主分类号 |
B21B1/46 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|