发明名称 Method for producing layers located on a hybrid circuit
摘要 A method for obtaining layers defined on a hybrid circuit. The hybrid circuit including a substrate and at least one elementary circuit that includes a first facet and a second facet, being hybridized via the second facet to a facet of the substrate. This facet of the substrate and each elementary circuit are coated with a first layer, the first layer is removed from the first facet of the elementary circuit, the first facet and the subsisting part of the first layer are coated with a second layer, and the subsisting part and the second layer covering it are removed. Such a method may, for example, find application to obtaining an antireflection or metal layer on a chip.
申请公布号 US7759261(B2) 申请公布日期 2010.07.20
申请号 US20040576056 申请日期 2004.10.13
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 MARION FRANCOIS;RAMBAUD PHILIPPE;MATHIEU LYDIE
分类号 H01L21/31 主分类号 H01L21/31
代理机构 代理人
主权项
地址
您可能感兴趣的专利