发明名称 |
METHOD FOR CONTROLLING FLOW AND CONCENTRATION OF LIQUID PRECURSOR |
摘要 |
A method for controlling flow and concentration of a liquid precursor includes: supplying a carrier gas to a first auto-pressure regulator and outputting therefrom the carrier gas at a first pressure to a precursor reservoir; outputting the mixture of the vaporized precursor and the carrier gas from the precursor reservoir; and supplying the mixture to a second auto-pressure regulator and outputting therefrom the mixture at a second pressure to a reactor via an orifice.
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申请公布号 |
US2010178423(A1) |
申请公布日期 |
2010.07.15 |
申请号 |
US20090353076 |
申请日期 |
2009.01.13 |
申请人 |
ASM JAPAN K.K. |
发明人 |
SHIMIZU AKIRA;KOBAYASHI AKIKO;KANAYAMA HIROKI |
分类号 |
C23C16/455;F17D1/16 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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