THE MICRO FLOW SENSOR AND HYDROPHONE USING THE SAME

摘要

PURPOSE: A minute fluid movement or velocity sensor and a hydrophone using the same are provided to detect the minute fluid flow change of underwater. CONSTITUTION: A minute fluid movement or velocity sensor comprises a minute sense structure(11) and a stress sensor(12). The minute sense structure is perpendicularly projected in order to sense the external fluid flow. The minute sense structure has the aspect ratio more than 5 while bending with the fluid flow. The stress sensor is installed in a rigidizer(13) in which the minute sense structure is installed. The stress sensor is respectively welded in the rhombic of the minute sense structure bottom. The stress sensor senses the pressure gradient according to the movement of the minute sense structure. The minute sense structure is formed into the plastic.