COMPENSATING APPARATUS AND METHOD FOR HETERODYNE LASER INTERFEROMETER

摘要

PURPOSE: A heterodyne laser interferometer correction completion apparatus and a method thereof are provided to reduce the error according to working environmental factors. CONSTITUTION: A heterodyne laser interferometer correction completion apparatus comprises a first heterodyne laser interferometer(100A), a second heterodyne laser interferometer(100B), a first distance measuring part(200A), second distance measuring part(200B) and a data fusion zone(300). The first distance measuring part measures the translation distance of object by using the signal which the first heterodyne laser interferometer measures. The second distance measuring part measures the translation distance of object by using the signal which the second heterodyne laser interferometer measures. The data fusion zone revises error by using data aggregate. The data aggregate comprises the translation distance of the object which the translation distance and the second distance measuring part of the object which the first distance measuring part measures measure the plurality of times.