发明名称 TUNNEL MAGNETORESISTIVE THIN FILM AND MAGNETIC MULTILAYER FILM FORMATION APPARATUS
摘要 A tunnel magnetoresistive thin film which can simultaneously realize a high MR ratio and low magnetostriction is provided. The tunnel magnetoresistive thin film comprises a magnetization fixed layer, a tunnel barrier layer, and a magnetization free layer, wherein the tunnel barrier layer is a magnesium oxide film containing magnesium oxide crystal grains and the magnetization free layer is a layered structure including a first magnetization free layer and a second magnetization free layer, the first magnetization free layer being made of alloy containing Co atoms, Fe atoms, and B atoms or containing Co atoms, Ni atoms, Fe atoms, and B atoms, having a body-centered cubic structure, and having (001) orientation, the second magnetization free layer being made of alloy containing Fe atoms and Ni atoms and having a face-centered cubic structure.
申请公布号 US2010178528(A1) 申请公布日期 2010.07.15
申请号 US20080602831 申请日期 2008.06.06
申请人 CANON ANELVA CORPORATION 发明人 TSUNEKAWA KOJI;NAGAMINE YOSHINORI
分类号 G11B5/39 主分类号 G11B5/39
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