发明名称 |
ENHANCED COAT BOWL WASH: COATER TRACKS/WORKCELLS |
摘要 |
A cleaning system which can be integrated into a coater track system for use in the production of semiconductor devices and methods for its use are provided. The cleaning system can include a series of nozzles having assorted configurations and features which provide uniform and efficient rinsing of excess material.
|
申请公布号 |
US2010175722(A1) |
申请公布日期 |
2010.07.15 |
申请号 |
US20090351987 |
申请日期 |
2009.01.12 |
申请人 |
SALINAS ADRIAN;PETERSON JOEL |
发明人 |
SALINAS ADRIAN;PETERSON JOEL |
分类号 |
B08B9/34 |
主分类号 |
B08B9/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|