| 摘要 |
Provided are: a magnetic bearing device capable of reducing the costs required for the manufacture, installation, or the like of a turbo molecular pump by reducing the number of elements of an amplifier circuit that drives, through excitation, electromagnets; and a turbo molecular pump with the magnetic bearingdevicemountedthereto. Oneend (151a) of an electromagnet coil (151) constituting each of electromagnets (104, 105, 106A, and 106B) is connected to a common node (C). The common node (C) is connected to a switch circuit (280) composed of a transistor (281) and a diode (285). The other end (151b) of the electromagnet coil (151) is connected to an amplifier circuit (250) composed of a transistor (261) and a diode (265).
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