发明名称 |
Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program |
摘要 |
Scheduling of tasks in a lithographic apparatus, track unit or lithocell is performed by maintaining a register of the state of the machine and a database of tasks performable by the machine, generating possible sequences of tasks based on pre- and post-conditions on the system state (rather than a precedence relation) and selecting a sequence from the generated sequences that meets a given beginning state of the machine and a desired end state. Embodiments of the invention also allow for automated recovery from exceptions.
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申请公布号 |
US7756597(B2) |
申请公布日期 |
2010.07.13 |
申请号 |
US20040953869 |
申请日期 |
2004.09.30 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
VAN DEN NIEUWELAAR NORBERTUS JOSEPHUS MARTINUS;KOENEN WILLEM HERMAN GERTRUDA ANNA;ONVLEE JOHANNES;VAN LIEROP HENRICUS PETRUS JOHANNES;DUMONT ROBERT JOZEF;ROODA JACOBUS EELKMAN;STOETS MICHIEL ANTAL ROGIER |
分类号 |
G03F7/20;G06F19/00;G05B15/00;G05B19/418;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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