| 摘要 |
Provided is a micro-electromechanical device capable of processing an electric signal in the high frequency region by a simple device structure. The micro-electromechanical device is formed, including an oscillator element having a plurality of electrodes disposed on a substrate and a beam facing the electrodes to oscillate by electrostatic drive. An input/output of a high frequency signal is applied to one of the combinations of the electrodes and the beam.
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